Advanced Techniques for Improving Laser Optical Surfaces.

摘要

Chemical and chemical-mechanical polishing, ion-beam polishing, bowl-feed and continuously recycled abrasive 'super-polishing' techniques were evaluated for single crystal and polycrystalline potassium chloride and calcium fluoride, and polycrystalline zinc selenide. Optimized conventional grinding and polishing techniques were established for calcium fluoride and zinc selenide. Diamond abrasive polishing, using conventional techniques, was shown to produce superpolished surfaces conveniently and reliably on these materials. Optimized chemical polishing techniques were selected for potassium chloride and zinc selenide, and a potentially useful chemical polish for calcium fluoride was identified. Ion beam polishing was shown to be potentially useful only as a final surface cleaning step, preparatory to antireflection coating deposition.