Hybrid Organic-Inorganic Films Grown Using Molecular Layer Deposition

摘要

This short report will first review several MLD systems that have been demonstrated to illustrate the current state-of-the-art. Some new systems will then be introduced to show the diversity of chemistries that can be employed to grow various hybrid organic-inorganic films. Lastly, speculations will be offered on the future prospects for the MLD of hybrid organic-inorganic materials.