Electro-Oxidation of Gallium Arsenide. 1. Initial Phase of Film Formation in Tartaric Acid-Water-Propylene Glycol Electrolyte.

摘要

A standard galvanostatic procedure was used to study the initial phase of anodic oxidation of n-GaAs in a 3 weight percent (w/o) aqueous solution of tartaric acid mixed with propylene glycol. The initial phase is controlled by a two-dimensional growth of oxide from nuclei generated at a rate of about 10 to the 7th power /sq cm-sec. The effect of pH and illumination was examined in terms of the kinetics of nucleation in a heterogeneous system involving the semiconductor as the solid phase.