Production Engineering Measure for an Electron-Beam Machine and Microwave Transistors.

摘要

During the seventh quarter of this contract,significant achievements included a performance evaluation and debug of the Kent Cambridge Instruments Lanthanum Hexaboride electron gun and improvement of the process for marker definition for e-beam alignment. In addition, a trial lot was completed which tested the upgraded pattern definition and auto-align system (APR II),and six transistor lots were processed through the composite definition level.