Planar HgCdTe Quadrantal Heterodyne Arrays with GHz Response at 10.6 micrometers.

摘要

Planar quadrantal arrays of GHz response HgCdTe photodiodes for application in CO2 laser radar have been fabricated using ZnS as a diffusion mask for an indium-mercury diffusion. Quantum efficiencies over 50% have been obtained with a uniformity within the array of better than + or - 3% Electrical isolation between array elements was better than 35 dB out to 1.5 GHz, yet negligible optical dead space was found between the photodiodes. (Author)