An Investigation of the Possible Application of Laser Trimming to Acoustical Transducers.

摘要

An experimental investigation has been made of the possibility of using a laser to remove shorts and to trim lengths of high frequency interdigital transducers. Such a laser is required to have the capability of removing pieces of the metallic electrodes in increments of 1sq micron or less. The experiment was performed on a 1000 A thick aluminum layer on top of a 300 A thick chromium layer on a quartz substrate which is a typical coating used for making interdigital transducers. Using a doubled Nd:YAG laser (wavelength 0.532micron) with a pulse of about 100nsec it was found that holes of area 1sq micro could be punched with a pulse energy of about 1 microjoule. (Author)