Radiation Degradation of Alpha-Substituted Acrylate Polymers and Copolymers.

摘要

Radiation degradation is observed in poly(methyl alpha-chloroacrylate), poly(methyl alpha-cyanoacrylate), and poly(alpha-chloroacrylonitrile) homopolymers and their respective MMA copolymers when gamma-irradiated in vacuo. Polymer degradation susceptibilities are quantified in terms of G(scission radicals) and G(scission)-G(crosslinks), measured by EPR and membrane osmometry, respectively; values by these two methods are compared. Higher G(rads) values ranging from 2 to 6 and (G(s)-G(x)) values ranging from 2 to 11 are obtained for the subsituted polymers and copolymers relative to the values for PMMA (1.6; 1.9), a standard e-beam positive resist, which suggests that these modified polymers are more sensitive e-beam resists than PMMA. (Author)