Development of a Triple-Product Convolver Using Zinc Oxide on Silicon.

摘要

Triple-product convolution has been demonstrated with two modulated 80 MHz carrier signals and a third signal consisting of a set of dc voltages. This operation was performed in realtime with two different surface acoustic wave (SAW) devices built on silicon substrates. The transduction of SAWs onto silicon is by means of a thin overlying film of zinc oxide, which is deposited by RF sputtering in a partial oxygen atmosphere. Transducer patterns are defined by 'lift-off' photolithography. Good predictions of steady-state device behavoir were made using mathematical models, although observed long term memory effects, probably associated with trapping of charge in the ZnO and the Si/SiO2 interface, are not fully understood. (Author)