An X-Ray Fluorescence Method of Analysing Thin Films of Indium Antimonide.

摘要

A precision method of measuring the atomic composition and thickness of thin films containing indium and antimony is described. This method relies on measuring the attenuation by the film of fluorescent X-rays from the calcium atoms in the glass substrate. The results are independent of layering or compositional variations in the direction perpendicular to the substrate. Measurements are made at two calcium emission wavelengths, selected so that one of these lies between the L absorption edges for indium and antimony and the other lies outside the region. Experimental results confirm the validity of the technique, and an error analysis is presented. The method is applicable to films of other composition, including those containing more than two elements, for which examples are given, together with suitable fluorescing substrate atoms. (Author)