Ultraviolet Enhanced Deposition from Pentacarbonyl-Iron on Gallium Arsenide, Quartz, and Sapphire

摘要

This report assesses the potential utilization of organo-metals in the thin-film deposition of metals, semiconductors, and insulators onto various substrates. The emphasis is on the particular advantages of the ultraviolet photolysis of organometals using incoherent light for low temperature, wide-area deposition of thin films. Experimental results on the photolysis and pyrolysis of pentacarbonyl-iron on gallium arsenide, quartz, and sapphire are reported. (Author)