High-speed, Low Voltage, Miniature Electro-optic Modulators Based on Hybrid Photonic-Crystal/Polymer/Sol-Gel Technology.

摘要

The funding for the work reported here was provided by an STTR Phase II AFOSR grant. This report covers the design, fabrication, and test of proof- of-concept miniature electrooptic (EO) modulators at 1550 nm wavelength, based on state-of-the-art hybrid silicon/polymer/sol-gel technology. TIPD, LLC and the University of Arizona have demonstrated, for the first time, miniature hybrid phase modulators that are fabricated on silicon-on-insulator (SOI) substrates utilizing a novel Si nanostrip infrastructure for light guidance and superior EO polymers for signal modulation. The realization of such SOI-based hybrid modulator devices provides a critical leap towards the eventual accomplishment of low-cost, chip-based silicon photonics.