Automation of Pre-Cap Visual Inspection for Integrated Circuits.

摘要

The feasibility of an automatic inspection system which can perform a 100% internal visual inspection of integrated circuits (ICs) during production was investigated. Columbia Research Corporation (CRC) reviewed technical approaches and the feasibility of applying them to production. They also surveyed the companies currently developing automated IC inspection systems and found that no commercial contractor has installed equipment for routine inspection on a production basis. This project was terminated because the necessary equipment is still undergoing design and evaluation.