Quartz Envelope Heater: A New Heating Technique for MOCVD Systems.

摘要

The quartz envelope heater, a new heating apparatus designed specifically for metal organic chemical vapor deposition, is described. Discussed as well are its advantages over traditional heating techniques, such as RF induction heating and quartz lamp heating. The apparatus also has more general application to any chemical vapor deposition system which requires a single temperature zone to a maximum of 800 C and which does not contain reactants that chemically attack quartz glass.