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Thin-Film Transistors Fabricated in Solid-Phase-Recrystallized Si Films on Fused Silica Substrates

机译：在熔融石英衬底上制备的固相重结晶硅薄膜薄膜晶体管

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Tsaur, B. Y.; Fan, J. C. C.; Turner, G. W.; Geis, M. W.; Silversmith, D. J.;
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年度 1983
页码 p.1-4
总页数 4
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Silicon; Recrystallization; Thin films; Transistors; Substrates; Vapor deposition; Solid phases; Fabrication; Reprints;

机译：硅;重结晶;薄膜;晶体管;基板;气相沉积;固相;制造;重印;

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专利

1. Thin‐film transistors fabricated in solid‐phase‐recrystallized Si films on fused silica substrates [J] . Journal of Applied Physics . 1983,第2期

机译：在熔融石英衬底上以固相重结晶硅膜制造的薄膜晶体管
2. Single-grain Si thin-film transistors on flexible polyimide substrate fabricated from doctor-blade coated liquid-Si [J] . Zhang J., Trifunovic M., van der Zwan M., Applied Physics Letters . 2013,第24期

机译：由刮刀涂层液态硅制成的柔性聚酰亚胺基板上的单晶硅薄膜晶体管
3. Single-grain Si thin-film transistors on flexible polyimide substrate fabricated from doctor-blade coated liquid-Si [J] . J. Zhang, M. Trifunovic, M. van der Zwan, Applied Physics Letters . 2013,第24期

机译：由刮刀涂层液态硅制成的柔性聚酰亚胺基板上的单晶硅薄膜晶体管
4. High-gain photodetectors in thin-film transistors fabricated from laser-crystallized silicon on fused silica [C] . Chiang A., Johnson N.M. Electron Devices Meeting, 1984 International . -1

机译：由熔融石英上的激光结晶硅制成的薄膜晶体管中的高增益光电探测器
5. Study of Fused Thiophene Based Organic Semiconductors and Interfacial Self-Assembled Monolayer (SAM) for Thin-Film Transistor (TFT) Application. [D] . Youn, Jangdae. 2012

机译：熔融噻吩基有机半导体和薄膜晶体管（TFT）应用的界面自组装单分子膜（SAM）的研究。
6. Thermal Damage-Free Microwave Annealing with Efficient Energy Conversion for Fabricating of High-Performance a-IGZO Thin-Film Transistors on Flexible Substrates [O] . Ki-Woong Park, Won-Ju Cho 2021

机译：热损坏微波退火具有高效的能量转换用于在柔性基板上制造高性能A-IGZO薄膜晶体管
7. Single-grain Si thin-film transistors on flexible polyimide substrate fabricated from doctor-blade coated liquid-Si [O] . Zhang, J., Trifunovic, M., Van der Zwan, M., 2013

机译：由刮刀涂层液态硅制成的柔性聚酰亚胺基板上的单晶硅薄膜晶体管
8. Thin-Film Transistors Fabricated in Solid-Phase-Recrystallized Si Films on Fused Silica Substrates. [R] . Tsaur, B. Y., Fan, J. C. C., Turner, G. W., 1983

机译：在熔融石英衬底上制备的固相重结晶硅薄膜薄膜晶体管。

Thin-Film Transistors Fabricated in Solid-Phase-Recrystallized Si Films on Fused Silica Substrates

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