Fundamental Studies of Laser Interaction in Materials Preparation: New Aspects of Chemical Vapor Deposition, Trichlorosilane, Literature Survey and Combustion Experiments

摘要

Various properties and reactions of trichloorosilane (SiHC13) have been studied to obtain information on the combustion of trichlorosilane. The infrared absorption spectra, impact flammability results and the heat of formation of SiHC13 are included in this paper. The production of silicon from trichlorosilane by thermal decomposition and hydrogen reduction is reviewed to point out certain reaction characteristics of SiHC13. The combustion of trichlorosilane is studied in detail. Two reactions are proposed as being the combustion and are as follows. (1) 5SiHC13 + 02 yields 5Si02 + HC1 + 7C12 + 2H20; and (2) SiHC13 + 02 yields Si02 + HC1 + C12 Having no basis on which to determine which of the two reactions is the actual combustion reaction, both are considered in this paper. The theoretical heat of combustion for reaction 1 is -815.3 cal/g and for reaction 2 is -774.9 cal/g. Combustion experiments were performed with trichlorosilane using a Parr semimicro calorimeter. The amount of SiHC13 lost by evaporation between the time the sample was weight and ignited was estimated. Using this corrected mass value, the heat of combustion of trichlorosilane was found to be -803.8 cal/g, which tends to indicate that reaction 1 above, dominates.