Diagnostical Measurements in a Single Electrode, Atmospheric Pressure, Microwave Plasma

摘要

Several important diagnostic parameters are determined for a single electrode atmospheric pressure plasma system described by HANAMURA et al 1,2. These include excitation temperatures and electron number densities and electron temperatures for various plasma gases at several different input powers. The variation of emission intensity with various plasma gases and their mixtures is investigated, as well as the effect of the chemical form of the sample on emission intensity, for the purposes of optimizing operating conditions for emission spectrochemical analysis. (Author)