Solvent Evaporation Technique for Depositing Thin Films on Optical Substrates

摘要

Interference coating of titanium and zirconium oxide were prepared by a solvent evaporation, or sol-gel, process. Solutions of polymerized metal oxides were prepared from the hydrolysis reaction of diluted metal alkoxides. Coatings were applied to ordinary glass microscope slides by vertical withdrawal from the prepared solutions. Films with thicknesses of 25-200 nm were applied with excellent adherence and durability. Refractive indices and thickness were measured by ellipsometry. The transmission spectra of coated slides were measured and compared to theoretical calculations assuming no absorption. Quarter-wave layers of ZrO2 on TiO2 were produced as an antireflective coating at 465 nm.