Fast Discharge Excimer Laser with Symmetric Geometry.

摘要

Up to date, the excimer lasers pumped by Blumlein circuit are mostly having an asymmetric geometry using single plate capacitors to store energy. The experiments of Schwab on N2 gas lasers showed that poor spatial symmetry of the laser beam is obtained from the single plate asymmetric laser. Beams with good spatial symmetry can be obtained from lasers of double plate structure. We have constructed a fast discharge excimer laser with symmetric geometry using glued and hot pressed double plate capacitor for energy storage. With this device, N2, XeF and KrF lasers with good spatial symmetry were obtained. Preliminary study on the parameters of the XeF excimer system was carried out with this experimental device.