Characterization of Aluminum Nitride/Aluminum Oxide Reactively Sputtered Antireflection Coatings

摘要

Aluminum nitride/aluminum oxide multilayer protective antireflection coatings are being developed for use on laser windows. These materials have been shown to be relatively stable and scratch resistant, thus demonstrating their applicability for this use. Both two- and three-layer coatings were designed at the wavelength of 0.500 micrometer. The design techniques utilized, as well as the resulting transmission spectra, are discussed.