Analysis of Experimental Data for Neutralization of Low-Energy Ions at a Surface

摘要

When low-energy ions are incident on a solid surface, a large fraction is neutralized via on Auger or resonance process. Some useful information on details of the neutralization process can be obtained by studying the ion fraction of backscattered particles. An accurate evaluation of the characteristic velocity, is expected to be particularly useful. In this paper we give a theoretical analysis of experimental ion yield data that exist in the literature. It is shown that a successful interpretation of the ion yield data can be made by taking into account the variation of the characteristic velocity with respect to the incident ion energy. Keywords: Ion surface scattering; Low energy; Neutralization. Auger resonance processes; Characteristic velocity; Experimental data analysis.