Fabrication of Arrays of GaAs Optical Bistable Devices

摘要

Arrays of fast optical bistable devices (OBD's) hold excellent promise in the implementation of parallel optical computation systems. The fabrication of an array of 9 x 9 micrometer pixels of OBD's on a GaAs/AlGaAs molecular beam epitaxial layer is reported here. The pixels were defined by reactive ion etching in a freon, helium, and oxygen gas mixture. The array consisting of over 100 x 100 devices, formed good quality, uniform interferometers, exhibiting a single fringe in transmitted light.