Multilayer Capacitor Dielectrics Produced from Metallo-Organic Precursors

摘要

The metallo-organic decomposition (MOD) process is an alternate to expensive methods of preparing thin films. The process involves: dissolving the metallo-organic compounds in an appropriate solvent; mixing the solutions to achieve desired stoichiometry; after adjusting the rheology, depositing these formulations on an appropriate substrate to make a film and then firing these wet films to obtain the desired conductor, resistor or dielectric thin/thick films. Since the mixing of the starting materials is on the molecular level, the inorganic species exist as atoms or molecules in intimate contact immediately after decomposition. This leads to much more rapid formation of compounds and sintering of films, which translates to lower temperature processing of equilibrium phases and more dense films. The metallo-organic compounds used in the present study, a low viscosity solution of metallo-organic compounds was deposited on a spinning substrate to obtain wet films. The object of this project is to prepare multilayer dielectric films using the MOD technique. Studies of the formation of dielectric and electrode films using the MOD technique are focus of this report. Keywords: Capacitors.