Interactive Computer Program for Materials Analysis by Means of Ion Scattering

摘要

This report describes the theory and operation of a program for analysing the data obtained by the scattering of high-energy ions from a sample whose elemental depth concentration profiles are desired. The region so analysed is from the surface to depths of about three micrometers, with a depth resolution of about 30 nm near the surface. The program, written in an enhanced BASIC system language for a desktop computer, is designed for users who are specialists in materials sciences, such as metallurgy of semiconductor device technology, rather than in ion beam technology. The program is highly interactive in the following ways: (i) the user exerts direct control over program flow by means of event-initiated branching, (ii) the computer communicates with the user at the user's natural level (two or three dimensions) vice the computer's natural level (one dimension), and (iii) about 99 percent of the program lines are dedicated to input/output operations and error inhibition and handling. Keywords: Ion beams, Scattering, Computer programs, Basic programming language, Ion scattering, High energy, Ions.