首页> 美国政府科技报告 >Summary Abstract: Ion-Beam-Induced Deposition of Gold by Focused and Broad-Beam Sources

【24h】

Summary Abstract: Ion-Beam-Induced Deposition of Gold by Focused and Broad-Beam Sources

机译：摘要摘要：离子束诱导聚焦和宽束光源沉积金

获取原文

页面导航

摘要
著录项
引文网络
相似文献
相关主题

摘要

Ion beam induced deposition is a novel method of film growth in which an ion, incident on a substrate, decomposes a gas molecule, for example an organometallic, leaving the metal atom on the substrate.

著录项

作者
Dubner, A. D.; Shedd, G. M.; Lezec, H.; Melngailis, J.;
展开▼
作者单位

展开▼
年度 1987
页码 p.1-4
总页数 4
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Ion bombardment; Metal films; Atoms; Deposition; Gases; Growth(General); Ion beams; Metals; Molecules; Reprints; Substrates; Decomposition; Reaction kinetics; Organometallic compounds;

机译：离子轰击;金属薄膜;原子;沉积;气体;生长（一般）;离子束;金属;分子;重印;基质;分解;反应动力学;有机金属化合物;

相似文献

外文文献
中文文献
专利

1. Comprehensive analysis of the deposition caused by scattered Ga ions during focused ion-beam-induced deposition [J] . Tripathi S.K., Shukla N., Rajput N.S., Micro & Nano Letters, IET . 2010,第5期

机译：聚焦离子束诱导沉积过程中由分散Ga离子引起的沉积的综合分析
2. Comprehensive analysis of the deposition caused by scattered Ga ions during focused ion-beam-induced deposition [J] . S.K. Tripathi N. Shukla N.S. Rajput A.K. Singh and V.N. Kulkarni Micro & Nano Letters . 2010,第5期

机译：聚焦离子束诱导沉积过程中由分散Ga离子引起的沉积的综合分析
3. Deposition of carbonaceous structures using focused Au and Si ion-beam-induced chemical vapor deposition methods [J] . Ryo Okada, Takuma Yo, Junichi Yanagisawa, Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures . 2007,第6期

机译：使用聚焦金和硅离子束诱导化学气相沉积方法沉积碳质结构
4. Gallium nitride nanowires: polar surface controlled growth, ohmic contact patterning by focused ion-beam-induced direct Pt deposition and disorder effects, variable range hopping, and resonant electromechanical properties [C] . Chang-Yong Nama, Douglas Tham, Papot Jaroenapibaf, Conference on Nanomaterial Synthesis and Integration for Sensors, Electronics, Photonics, and Electro-Optics . 2006

机译：氮化镓纳米线：极性表面控制的生长，欧姆接触通过聚焦离子束诱导的直接PT沉积和病症效果，可变范围跳跃和谐振机电性能
5. Focused ion beam micromachining of silicon and gallium arsenide using gallium and gold liquid metal ion sources. [D] . Crow, Geoffrey A. 1990

机译：使用镓和金的液态金属离子源对硅和砷化镓进行聚焦离子束微加工。
6. Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition [O] . Cristiano Glessi, Aya Mahgoub, Cornelis W Hagen, 2021

机译：金（I）聚焦电子束沉积的N-杂环基石前体
7. Model for nanopillar growth by focused helium ion-beam-induced deposition [O] . Alkemade, P.F.A. (author), Chen, P. (author), Van Veldhoven, E. (author), 2010

机译：聚焦氦离子束诱导沉积的纳米柱生长模型

Summary Abstract: Ion-Beam-Induced Deposition of Gold by Focused and Broad-Beam Sources

摘要

著录项

引文网络

相似文献

相关主题

期刊订阅