420X420 Charge-Coupled-Device Imager and Four-Chip Hybrid Focal Plane

摘要

We have designed and fabricated a 420x420 pixel front-illuminated CCD imager. The device was designed to be used both individually and as a part of a four-chip focal plane consisting of four chips closely abutted in a 2x2 array, for a total resolution of 840x840 pixels. Particular attention has been paid to achieving low-noise operation, and a noise levels of less than 20 e at a 1.0 MHz data rate have been achieved routinely. We describe special focal plane assembly techniques with which we have achieved 1 micrometer relative positional accuracy between the chips.