Temporally and Spatially Resolved Studies in an Amplitude Modulated Inductively Coupled Plasma

摘要

The rf power introduced into an inductively coupled plasma (ICP) has been amplitude modulated between 1 kW and 250 W. The utility of this perturbation for the study of plasma intrinsic properties such as the recombination continuum and argon emission, which were monitored with spatial and temporal resolution, is described. In addition, the use of this perturbation for the investigation of analyte emission spatial profiling is demonstrated. Observed relaxation times for several plasma species indicate ambipolar diffusion, thermal conduction, and radiative recombination to be rate-limiting steps in plasma relaxation. Finally, this experimental approach shows great potential as a method for the study of atomization mechanisms and molecular recombination reactions occurring in the plasma. (Author)