Evaluation of Chemically-Sensitive Field-Effect Transistors for Detection of Organophosphorus Compounds.

摘要

This study resulted in the design, fabrication, and evaluation of an interdigitated gate electrode Chemically-Sensitive Field-Effect Transistor (CHEMFET). The electrical performance of the CHEMFET sensors coated with the following thin films was evaluated in frequency domain for detecting the gas concentration changes of organophosphorus compounds (diisopropyl methylphosphonate (DIMP) and dimethyl methylphosphonate (DMMP)) in the air: cobalt phthalocyanine, nickel phthalocyanice, 2-maphthol (beta), succinylchoride, succinylcholine chloride, and L-histidine dihydrochloride. The change in the chemical state of a film was manifested as a change in the CHEMFET sensors' output response, when the CHEMFET SENSOR was excited with a pulse. The results showed the CHEMFET sensor coated with cobalt phthalocyanine produced consistent responses upon exposure, with respect to three concentrations of DIMP and DMMP, at two measurement temperatures. Thesis. (rrh)