Autonomous Control System for Czochralski Growth of LEC (Liquid Encapsulated Crystals) GaAs

摘要

The consolidation of the Czochralski Growth Control System(CGCS) is a revision of the hardware and software within the constraints of the first generation. The consolidation consists of: a cabinet that is physically more compatible with the Cambridge console; a more modular hardware arrangement that facilitates calibration, servicing, and expansion; increased accuracy and stability of the system variable measurements; and many software enhancements, including increased controller flexibility and improved diameter estimation and control. The hardware and software installation has been completed and crystal growth with complete digital control has been demonstrated. Keywords: Liquid encapsulated crystal; Single crystal; Crystal growth; Gallium arsenide. (jhd)