Monolayers of 11-Trichlorosilylundecyl Thioacetate: A System that Promotes Adhesion between Silicon Dioxide and Evaporated Gold

摘要

This chapter describes the use of sulfur-containing organic monolayers to improve the adhesion of gold to silicon substrates having a native silicon dioxide surface layer. Gold adheres to clean silicon, but not to silicon dioxide. The affinity of gold toward silicon dioxide can be improved by coating with chromium or titanium films or by adding interlayers containing fluoride salts. Bombardment of gold-covered silicon dioxide with electrons or heavy ions also enhances adhesion. Thin covalently-bonded alkylsiloxane films containing amines or epoxides improve the adherence of gold to glass. Here we demonstrate that covering a Silicon/Silicon dioxide substrate with a covalently attached organic monolayer film containing thiol groups (and possibly disulfides derived from them) or thioacetate groups improves the adhesion of gold to the substrate. (AW)