Polar Coordinate Laser Writer for Binary Optics Fabrication

摘要

A Laser Writer system for recording centro-symmetric patterns in photoresist hasbeen developed as an alternative method for binary optics mask and component fabrication. This system is capable of generating binary amplitude patterns with linewidths below 1 micron and with a positional accuracy of less than 0.1 micron on up to 3 in. diameter planar substrates. The measured wavefront error and diffraction efficiency of a direct-write two-phase-level F/10 lens confirm that high quality components can be fabricated quickly, easily, and at low cost. (RH)