N,N'-Bis(triethylaluminio)ethylenediamine- and N,N'-Bis(trimethylaluminio)ethylenediamine-Derived Organometallic Precursors to Aluminum Nitride: Syntheses, Structures, and Pyrolyses

摘要

The reactions of triethylaluminum or trimethylaminum with ethylenediamine (en) ina 2:1 molar ratio have been studied. Pyrolysis of the initially formed adducts under nitrogen yields polymeric amides and imides. Evidence was also obtained for the formation of novel en-chelated organoaluminum intermediates during the conversion of the adducts to the amides. The structures and properties of the adducts, as well as their pyrolysis products, have been studied with (1)H and (13)C NMR, FT-IR, GC, DSC, TGA, elemental analysis, and XRD methods. AlN powder has been obtained by the pyrolysis of the imides at 1000 C in NH3. Preliminary studies were also carried out on the fabrication of AlN thin films on Si substrates by solution coating, using a solution of the bis(diethylauminio)ethylenediamine in benzene, followed by pyrolysis under NH3.