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Ion Beam Assisted Coating and Surface Modification with Plasma Source IonImplantation

机译：离子束辅助涂层和等离子体源离子注入的表面改性

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作者
Conrad, J. R.; Dodd, R. A.; Han, S.; Madapura, M.; Scheuer, J.;
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年度 1990
页码
总页数 7
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Ion implantation; Plasma sheaths; Ion beams; Nitrogen; Reprints;

机译：离子注入;等离子体鞘;离子束;氮;重印;

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Ion Beam Assisted Coating and Surface Modification with Plasma Source IonImplantation

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