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Plasma-Deposited Amorphous Carbon Films as Planarization Layers.

机译：等离子体沉积的非晶碳膜作为平面化层。

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No abstract available.

著录项

作者
Pang, S. W.; Horn, M. W.;
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年度 1990
页码 1-6
总页数 6
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Transistors; Lithography; Carbon; Reprints; Planar processes; Planarizing films; Carbon films; Plasma(Physics);

机译：晶体管;光刻;碳;重印;平面工艺;平面化薄膜;碳膜;等离子体（物理学）;

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1. Optical and electronic properties of plasma-deposited hydrogenated amorphous carbon nitride and carbon oxide films [J] . C. Godet, G. Adamopoulos, Sushil Kumar, Thin Solid Films . 2005,第1a2期

机译：等离子体沉积氢化非晶碳氮化碳和氧化膜的光学和电子性质
2. Corrosion Protection Ability of Plasma-Deposited Amorphous Hydrogenated Carbon and Fluorocarbon Films [J] . C.Srividya Journal of Materials Engineering and Performance . 1997,第5期

机译：等离子体沉积非晶氢化碳和氟碳薄膜的腐蚀防护能力
3. Refilling and Planarization of Patterned Surface with Amorphous Carbon Films by Using Gas Cluster Ion Beam Assisted Deposition [J] . Noriaki Toyoda, Tomokazu Hirota, Takafumi Mashita, Applied physics express . 2010,第6issue2期

机译：气体团簇离子束辅助沉积技术对非晶碳膜图形表面的填充和平面化
4. Planarization of amorphous carbon films on patterned substrates using gas cluster ion beams [C] . Noriaki Toyoda, Keisuke Nagato, Hiroshi Tani Annual Conference on Magnetism and Magnetic Materials . 2009

机译：使用气体簇离子束的图案底板上的非晶碳膜平面化
5. Atomistic analysis of the surface reactivity, roughness, and crystallinity of plasma-deposited amorphous silicon thin films. [D] . Valipa, Mayur S. 2005

机译：等离子体沉积非晶硅薄膜的表面反应性，粗糙度和结晶度的原子分析。
6. Toward High-Performance Coatings for Biomedical Devices: Study on Plasma-Deposited Fluorocarbon Films and Ageing in PBS [O] . Servaas Holvoet, Pascale Chevallier, Stéphane Turgeon, 2010

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7. Structural and optical properties of plasma-deposited amorphous hydrogenated oxygenated carbon films [O] . Steven F. Durrant, Ricardo T. de Oliveira, Sandra G. C. Castro, 1997

机译：等离子体沉积的无定形氢化含氧碳膜的结构和光学性质
8. Plasma-deposited amorphous hydrogenated carbon films and their tribological properties [R] . Miyoshi, Kazuhisa, Pouch, John J., Alterovitz, Samuel A. 1989

机译：等离子体沉积的无定形氢化碳膜及其摩擦学性能

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