Direct Writing of Microstructures for Solid-State Electronics.

摘要

Progress in using laser chemical processing for several applications in microelectronics and integrated optics is described. These applications are direct writing of metal interconnects on silicon integrated circuits; laser doping, etching and surface modification of GaAs, and fabrication of light guiding components for integrated optics. Keywords: Laser processing; Optical coupler; Diffraction grating; Laser; GaAs; Si; Integrated optics; Integrated circuits; Aluminum metallization; Shallow doping; Waveguides. (jhd)