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Formation of a Solid Lubricant in Boron Carbide by Nitrogen Ion Implantation andLaser Annealing

机译：氮离子注入和激光退火在碳化硼中形成固体润滑剂

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Reeber, R. R.; Kusy, R. P.; Yu, N.; Chu, W. K.;
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年度 1990
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总页数 5
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Boron nitrides; Solid lubricants; Ion implantation; Nitrogen; Boron carbides; Annealing; Laser beams; Wear; Tribology; Reprints;

机译：氮化硼;固体润滑剂;离子注入;氮;碳化硼;退火;激光束;磨损;摩擦学;重印;

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1. Boron diffusion layer formation using Ge cryogenic implantation with low-temperature microwave annealing [J] . Murakoshi Atsushi, Harada Tsubasa, Miyano Kiyotaka, Japanese journal of applied physics . 2016,第4期

机译：锗低温注入低温微波退火形成硼扩散层
2. Effect of Ramp Rates During Rapid Thermal Annealing of Ion Implanted Boron for Formation of Ultra-Shallow Junctions [J] . AGARWAL ADITYA, GOSSMANN HANS-J., FIORY ANTHONY T. Journal of Electronic Materials . 1999,第12期

机译：离子注入硼快速热退火过程中升温速率对超浅结形成的影响
3. Effect of Ramp Rates During Rapid Thermal Annealing of Ion Implanted Boron for Formation of Ultra-Shallow Junctions [J] . ADITYA AGARWAL, HANS-J. GOSSMANN, ANTHONY T. FIORY Journal of Electronic Materials . 1999,第12期

机译：离子注入硼快速热退火过程中升温速率对超浅结形成的影响
4. Boron Diffusion Behavior During the Formation of Shallow p~+ Junction Using the Combination of Ge Pre-amorphization Implantation, Pre-Annealing RTA and Post-Annealing Non-Melt Excimer Laser(NLA) Processes [C] . S.R. Aid, S. Matsumoto, T. Suzuki, Advanced gate stack, source/drain , and channel engineering for si-based CMOS 5: New materials, processes, and equipment . 2009

机译：锗预非晶化注入，预退火RTA和后退火非熔融准分子激光（NLA）工艺的结合，在浅p〜+ / n结形成过程中硼的扩散行为
5. Processing and deformation mechanisms of boron carbide titanium diboride directionally solidified eutectics. [D] . White, Ryan M. 2011

机译：碳化硼二硼化钛定向凝固共晶的加工和变形机理。
6. Influence of the Nitrogen Content on the Carbide Transformation of AISI M42 High-Speed Steels during Annealing [O] . Yi-Wa Luo, Han-Jie Guo, Xiao-Lin Sun, -1

机译：退火过程中氮含量对AISI M42高速钢碳化物转变的影响
7. Influence of the Nitrogen Content on the Carbide Transformation of AISI M42 High-Speed Steels during Annealing [O] . Yi-Wa Luo, Han-Jie Guo, Xiao-Lin Sun, 2018

机译：氮含量对退火期间AISI M42高速钢碳化物转化的影响
8. Formation of Niobium Carbides in High-Dose Carbon-Ion-Implanted and Annealed Niobium. [R] . Huang, J. S. 1989

机译：高剂量碳离子注入和退火铌中铌碳化物的形成。

Formation of a Solid Lubricant in Boron Carbide by Nitrogen Ion Implantation andLaser Annealing

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