Surface Raman Spectroscopy for Evaluation of Conformal Wafer Level UnionArchitectures

摘要

Molecular engineering is a novel concept that addresses many of the challengingreliability problems associated with advanced electronic materials. Strong metal-metal bonds can be formed at the surfaces of metals, semiconductors, ceramics, and other insulators and can serve as the basis for an engineered conformal interface. Such an engineered interface can be derived from laser directed chemical vapor deposition (LCVD) or from pyrolytic decomposition of suitable surface adsorbed compounds. In either case, the resulting surface layer is conformal to the substrate and is the first step in a sequence of layer depositions which lead to an architecture wafer level unions. Keywords: Raman spectroscopy; Molecular engineering; Surface site groups. (jes)