Expert System for the Identification of Silicon Impurities Using FTIR Spectroscopy.

摘要

An expert-system for the analysis of the infra-red spectra of silicon based electronic materials has been developed. The Fourier Transform Infra-Red Spectroscopy system produces characteristic spectral lines for impurities present in silicon materials under analysis. A MicroVax workstation with a commercially available expert-system shell is attached to the spectrometer. By examining these spectral line patterns the expert-system is able to deduce the identities and concentrations of the unknown impurities. The use of this program greatly reduces the analysis time required for each sample and produces more consistent results.