Folded Layer Multiple-Pass Cavity.

摘要

Structure of the folded layered multiple-pass cavity and its image quality are described, uniformity of scanning beam intensity at vertical direction in the middle position of the cavity is discussed, and the high precision result of the reflectance cavity mirror is given: The folded layered multiple-pass cavity presented in this article has the following physical requirements: it must have a light beam with a scanning range of 200mm x 800 mm and with a certain width; the scanning beam in a vertical direction must possess a certain amount of overlapping; the average non-uniformity of the beam intensity along the vertical direction of the central axis of the cavity is to be less than 50 percent. Therefore, it was required that the multiple-pass cavity not only have multiple reflections and good imaging quality of the scanning beam, but it must have an appropriate optical circuit track.