Adsorption and Thermal Behavior of Ethylene on Si(100)-(2x1).

摘要

The study of the interaction of hydrocarbons with silicon is of importance in understanding the thermally activated formation of adsorbed carbon on silicon. This is the first step in the formation of silicon carbide thin films by chemical vapor deposition (CVD). Silicon carbide is an important material because of its strength, refractory properties, chemical inertness, resistance to radiation damage and its ability to be used as an electronic material in a high temperature environment. Simple electronic devices made from silicon carbide have been produced, and progress in this area is actively continuing. Extensive research has been performed to determine the geometric and electronic structure of the Si(100) crystalline surface, as recently reviewed by Haneman. It has been found that the surface consists of rows of Si2 dimers yielding a (2x1) superstructure. Here, formally, a one half-filled dangling bond protrudes from the surface at each surface silicon atom.