RF Plasma Aerosol Deposition of Superconductive YBaCuO Films at Atmospheric Pressure.

摘要

Superconducting films were produced by a radio frequency (RF) plasma aerosol evaporation technique at atmospheric pressure without post-annealing. Aqueous solutions containing Y, Ba, and Cu were generated as an aerosol which was then injected into the plasma region. The ionized species were deposited onto substrates outside of both the plasma and flame regions. The substrate temperature was 400-600 deg C. The deposition rate is 0.01-100 micrometers/(min cm2), , and the film thickness is 1-200 micrometers. For an as deposited film on a single crystalline MgO substrate (100) with substrate temperature of 600 deg C, the onset temperature of the superconducting transition is 100K, with a transition width (10%-90%) of 3K, and zero resistance at 93K. An optimum substrate temperature for this technique is discussed. The as deposited films are compared with other post-annealed films (850 deg C, 1 hour). Since this technique does not require a vacuum environment it has potential for large scale production of thin films.