High-Precision Sensors/Actuators and Systems

摘要

Research and development of high-precision systems, micro electromechanicalsystems, distributed sensors/actuators, smart structural systems, high-precision controls, etc. have drawn much attention in recent years. These new devices and systems could bring a new technological revolution in modern industries and further impact future human lifes. This tutorial is concern with the most updated new technologies in this general area, such as silicon based sensors/actuators and control, piezoelectric micro sensors/actuators, micro actuation and control, micro sensor applications in robot control, optical fiber sensors/systems, etc. There are four essential subjects emphasized in this tutorial: (1) surveying the state-of-the-art research and development, (2) tutoring fundamental theories and tools, (3) demonstrating practical applications, and (4) discussing future research and development.