Temperature Dependence of Species Concentrations Near the Substrate during CVDDiamond Growth

摘要

Measurements have been made of the temperature dependence of CH3, CH4, and C2H2very near the substrate during filament-assisted diamond growth. CH3 was detected using (2+1) resonance-enhanced multiphoton ionization (REMPI), and CH4 and C2H2 concentrations were measured using sampling mass spectrometry. A strong dependence of the CH3 REMPI signal on substrate temperature was observed, which at low temperatures may be characterized as having an activation energy of