Terahertz Horn Antennas on Thin Membranes

摘要

The Terahertz frequency range offers significant potential advantages forsatellite systems. The use of miniature hollow metal waveguide at these high frequencies has made construction of such systems difficult and expensive. The goal of this program has been to apply integrated circuit fabrication techniques to increase flexibility and reliability, and to reduce cost. The focus of this effort has been the thin-membrane supported antenna in an etched horn. The horns are constructed in silicon using an anisotropic etch which naturally forms pyramidal holes. The antenna is supported within the horn on a membrane of silicon oxynitride, typically 1 m thick. Fabrication techniques have been developed for the production of individual horns, as well as linear and two-dimensional arrays for 93 and 242 GHz. Theoretical and measured patterns for the horns have been compared. A thin-film power-density meter has been designed. Imaging has been demonstrated at 93 GHz, using two-dimensional arrays. Integrated Circuit Antennas, Imaging Arrays, Terahertz.