Frequency Trimming Technique for Surface Acoustic Wave Devices

摘要

Currently, there is an in-house effort to produce a vibration-insensitive surfaceacoustic wave (SAW) resonator to stabilize the outputs of state-of-the-art SAW oscillators. One of the key elements in this investigation is the development of a simple, yet sensitive frequency trimming procedure to adjust the resonator frequency of a fabricated device. Background and procedural information for performing frequency trimming on a SAW resonator using a wet isotropic chemical etch are provided in this report. The results of this study revealed a trimming sensitivity of 0.33 ppm/A and 11.4% of performance degradation for a 10 kHz or 100 ppm shift in the resonant frequency of a device.