Processing of High Temperature Ceramic Superconducting Devices. Volume 1

摘要

This report describes the objectives and the results achieved in a three-yearresearch effort. The goals of the program included: (1) development of a process to grow high critical current, low surface resistance high temperature superconducting thin films on 2 substrates, (2) development of fabrication processes to support the development of passive microwave and IR focal plane interconnect devices, (3) design and implementation of passive microwave and IR focal plane interconnect devices, and (4) theoretical analysis of microwave losses in HTS thin films. High performance, microwave TlCaBaCuO thin films have been developed and put into pilot production in a 2 wafer process. Films are made in both single and double side configurations. The films have the lowest surface resistance at 77K of any material in existence, nearly 100 times better than OFHC Cu at 10 GHZ and 77K. Fabrication processes to produce passive microwave and IR focal plane interconnect devices have been developed: patterning, contacts, bonding, passivation, crossover metallization, and die attach. Passive microwave devices have been demonstrated that show orders of magnitude improvement over conventional technologies including resonators, bandpass filters, bandreject filters, delay lines, couplers, and resonator-stabilized oscillators.