Intelligent Control of Chemical Vapor Disposition Processes

摘要

Significant progress has been made in improving process control on the TechnionTB reactor by using a model-based approach to control design. This approach has led to improvements in two areas. First, it has made the control design process more efficient by reducing the time required by a trial and error approach. This will lead to a cost saving in manpower. Second, it has led to design of effective controllers whose design in not evident in a trial and error approach. This has led to improved regulation of actuation and deposition conditions. Both these improvements are expected to lead to a quicker deployment to new deposition strategies and eventually to the cost-effective production of diamond. Progress made under this contract has set the stage for further refinement and implementation of these control strategies in a production environment. Work in this area is under progress on a related contract with Norton Diamond film entitled 'Integration of Intelligent Process Control and Monitoring.'.