Optical Properties of Oxide Coatings Prepared by Ion-Assisted Deposition.

摘要

An investigation was made by changing the preparation parameters, such as different ion species, ion energy, and ion current density, etc., to determine their effects on refractive indices, absorption, and laser-induced damage threshold, etc. of the coatings of TiO2, ZrO2 and SiO2 whose oxide coatings were prepared by ion-assisted deposition.