Fabrication of PLZT/ITO Grating for Optical Switching and Reconfigurable OpticalInterconnect Applications

摘要

A two-dimensional opto-electronic diffraction grating based on Lead LanthanumZirconate Titanate (PLZT) ceramic material for optical switching and reconfigurable optical interconnect applications is demonstrated. Integratable chips are fabricated consisting of numerous fine interleaved transparent indium-tin oxide (ITO) electrodes on a polycrystalline PLZT ceramic substate. The chips measure one centimeter square. The electrode features are scaled and measure from 12.5 micrometers to 100 micrometers. Reported here are chip material and fabrication details.