Preshaping Photoresist for Refractive Microlens Fabrication

摘要

Refractive microlenses are fabricated by the preshaped photoresist refractiveoptics by melting (P(2)ROM) process. A polar coordinate HeCd laser beam lithography system (laser writer) is used to directly expose a continuous spheroidal profile into photoresist to fabricate 200-micrometer-diam microlenses with speeds between f/1.5 and f/5. Interferometric surface measurements, used to determine the optical quality of the preshaped microlenses, indicate reduced spherical aberration in slow lenses fabricated by the P(2)ROM method. (MM).