Geometric Characterization of Electromigration Voids (A Statistical Analysis ofElectromigration Voids)

摘要

The areas, perimeters, lengths, and widths of 998 electromigration induced voidson 38 test stripes have been measured by SEM and digital image analysis. Virtually all of the voids occurred along the passivation-conductor interface on the side of the stripe. A plot of the number of voids on each stripe versus time to failure does not extrapolate to zero at zero time to failure, which suggests there are a certain number of active sites predisposed to voiding. Electromigration, Voids.